The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2014

Filed:

Aug. 10, 2011
Applicants:

Eric L. Hogue, Galloway, OH (US);

Stephen J. Krak, Newark, OH (US);

Timothy J. Stanfield, Lewis Center, OH (US);

Inventors:

Eric L. Hogue, Galloway, OH (US);

Stephen J. Krak, Newark, OH (US);

Timothy J. Stanfield, Lewis Center, OH (US);

Assignee:

Battelle Memorial Institute, Columbus, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2012.01); G03F 7/20 (2006.01); G03F 1/60 (2012.01); G03F 7/24 (2006.01);
U.S. Cl.
CPC ...
G03F 1/14 (2013.01); G03F 7/70783 (2013.01); G03F 1/0007 (2013.01); G03F 1/60 (2013.01); G03F 7/24 (2013.01); G06F 7/703 (2013.01); G06F 7/7035 (2013.01); G06F 7/70791 (2013.01);
Abstract

A system for forming a pattern on a part comprises a chamber base, a pressure vessel and a retaining device. The retaining device is positionable between the chamber base and the pressure vessel to secure a deformable mask therebetween. The system further comprises a first pressure source, a second pressure source and a third pressure source. The first pressure source provides a negative pressure within the chamber to draw the mask towards a part installed within the chamber base. The second pressure source provides a positive pressure within the pressure vessel to direct the mask towards the part so that the mask corresponds to at least one complex non-planar surface of the part. The third pressure source provides a negative pressure within pressure vessel. An exposure source exposes the part through the mask while the mask is deformed corresponding to the at least one complex non-planar surface of the part.


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