The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Feb. 29, 2012
Masanobu Sato, Kyoto, JP;
Hiroyuki Yashiki, Kyoto, JP;
Mai Yamakawa, Kyoto, JP;
Takayoshi Tanaka, Kyoto, JP;
Ayumi Higuchi, Kyoto, JP;
Rei Takeaki, Kyoto, JP;
Masanobu Sato, Kyoto, JP;
Hiroyuki Yashiki, Kyoto, JP;
Mai Yamakawa, Kyoto, JP;
Takayoshi Tanaka, Kyoto, JP;
Ayumi Higuchi, Kyoto, JP;
Rei Takeaki, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A nozzle for discharging droplets of a processing liquid for processing a substrate has a main body including a supply port, a drain port, a processing liquid flow passageway connecting the supply port and the drain port, and a plurality of discharge ports from which the processing liquid is discharged. The processing liquid flow passageway includes a plurality of branch flow channels, which branch out between the supply port and the drain port and collect together between the supply port and the drain port. The plurality of discharge ports form a plurality of columns respectively corresponding to the plurality of branch flow channels; and are aligned along and connected to the corresponding branch flow channels. A piezo element applies vibration to the processing liquid flowing through the plurality of branch flow channels.