The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2014
Filed:
Dec. 05, 2008
Applicants:
Béatrice Wenk, Grenoble, FR;
Jean-francois Veneau, Eybens, FR;
Greg Hames, Raleigh, NC (US);
Inventors:
Assignee:
MEMSCAP, Crolles, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 3/34 (2006.01); G01P 15/125 (2006.01); B81C 1/00 (2006.01); G01P 1/02 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); B81B 2203/04 (2013.01); G01P 15/125 (2013.01); B81C 2203/019 (2013.01); B81C 1/00269 (2013.01); G01P 1/023 (2013.01); B81B 2201/0235 (2013.01);
Abstract
The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.