The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Mar. 20, 2012
Daniel J. Hoffman, Fort Collins, CO (US);
Daniel Carter, Fort Collins, CO (US);
Randy Grilley, Ault, CO (US);
Karen Peterson, Loveland, CO (US);
Daniel J. Hoffman, Fort Collins, CO (US);
Daniel Carter, Fort Collins, CO (US);
Randy Grilley, Ault, CO (US);
Karen Peterson, Loveland, CO (US);
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Abstract
Disclosed herein are systems, methods and apparatuses for dissociating a non-activated gas through a disc-shaped plasma in a remote plasma source. Two inductive elements, one on either side of the disc-shaped plasma, generate a magnetic field that induces electric fields that sustain the disc-shaped plasma. The inductive elements can be coiled conductors having any number of loops and can be arranged in planar or vertical coils or a combination of planar and vertical coils. Additionally, the ratio of inductive element radius to gap distance between the two inductive elements can be configured to achieve a desired vertical plasma confinement.