The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2014
Filed:
Nov. 01, 2006
Applicants:
Alexander Henstra, Utrecht, NL;
Michael Ross Scheinfein, Portland, OR (US);
Inventors:
Alexander Henstra, Utrecht, NL;
Michael Ross Scheinfein, Portland, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/00 (2006.01); H01J 37/26 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 37/26 (2013.01); H01J 2237/1534 (2013.01);
Abstract
The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.