The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2014

Filed:

Jun. 05, 2012
Applicants:

Scott Light, Boise, ID (US);

Dan Millward, Boise, ID (US);

Anton Devilliers, Boise, ID (US);

Yuan He, Boise, ID (US);

Michael Hyatt, Boise, ID (US);

Lijing Gou, Boise, ID (US);

Kaveri Jain, Boise, ID (US);

Zishu Zhang, Boise, ID (US);

Jianming Zhou, Boise, ID (US);

Inventors:

Scott Light, Boise, ID (US);

Dan Millward, Boise, ID (US);

Anton Devilliers, Boise, ID (US);

Yuan He, Boise, ID (US);

Michael Hyatt, Boise, ID (US);

Lijing Gou, Boise, ID (US);

Kaveri Jain, Boise, ID (US);

Zishu Zhang, Boise, ID (US);

Jianming Zhou, Boise, ID (US);

Assignee:

Nanya Technology Corp., Kueishan, Tao-Yuan Hsien, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
Abstract

A reticle with a composite polarizer includes: a transparent substrate; a patterned layer disposed on said transparent substrate; and a polarizing filter disposed on said transparent substrate, wherein said transparent substrate is substantially transparent with respect to illumination light, said patterned layer is partially opaque with respect to said illumination light, and said polarizing filter is capable of selectively polarizing said illumination light.


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