The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2014

Filed:

Dec. 23, 2010
Applicant:

Rajesh Kelekar, Los Altos, CA (US);

Inventor:

Rajesh Kelekar, Los Altos, CA (US);

Assignee:

Intermolecular, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/00 (2006.01); H01L 21/00 (2006.01); B05B 7/00 (2006.01); B05C 5/00 (2006.01); C40B 50/14 (2006.01); B01J 19/00 (2006.01); C40B 60/14 (2006.01);
U.S. Cl.
CPC ...
B01J 19/0046 (2013.01); B01J 2219/00612 (2013.01); B01J 2219/00605 (2013.01); B01J 2219/00531 (2013.01); C40B 50/14 (2013.01); B01J 2219/00756 (2013.01); B05B 7/00 (2013.01); B05C 5/00 (2013.01); B01J 2219/00596 (2013.01); B01J 2219/00443 (2013.01); C40B 60/14 (2013.01); B01J 2219/0036 (2013.01);
Abstract

An apparatus and method for combinatorial non-contact wet processing of a liquid material may include a source of a liquid material, a first reaction cell, a second reaction cell, a first plurality of gas jets disposed within an interior of the first reaction cell, the first plurality of gas jets configured to atomize the liquid material transferred to the interior of the first reaction cell, a second plurality of gas jets disposed within an interior of the second reaction cell, the second plurality of gas jets configured to atomize the liquid material transferred to the interior of the second reaction cell, a first vacuum element disposed along a periphery of the first reaction cell, and a second vacuum element disposed along a periphery of the at least a second reaction cell.


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