The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
Sep. 23, 2010
Pavel Adamec, Haar, DE;
Ivo Li{hacek Over (S)}ka, Haar, DE;
Gennadij Gluchman, Munich, DE;
Milan Snabl, Unterschleissheim, DE;
Pavel Adamec, Haar, DE;
Ivo Li{hacek over (s)}ka, Haar, DE;
Gennadij Gluchman, Munich, DE;
Milan Snabl, Unterschleissheim, DE;
Abstract
A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.