The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Jul. 19, 2012
Applicants:

Hiromi Inada, Tokyo, JP;

Kuniyasu Nakamura, Tokyo, JP;

Inventors:

Hiromi Inada, Tokyo, JP;

Kuniyasu Nakamura, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01); H01J 37/153 (2006.01); H01J 37/21 (2006.01); G01N 23/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/21 (2013.01); H01J 37/244 (2013.01); H01J 2237/1532 (2013.01); H01J 37/153 (2013.01); H01J 2237/2611 (2013.01); H01J 2237/21 (2013.01); H01J 2237/221 (2013.01); H01J 37/28 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/226 (2013.01); H01J 37/263 (2013.01); H01J 2237/153 (2013.01); H01J 2237/0492 (2013.01); G01N 23/2206 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/225 (2013.01);
Abstract

A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional observation of a 0.1 nm atomic size structure. The scanning transmission electron microscope according to the present invention also includes an aperture capable of changing an illumination angle; an illumination electron lens system capable of changing the probe size of an electron beam probe and the illumination angle; a secondary electron detector (); a transmission electron detector (); a forward scattered electron beam detector (); a focusing unit (); an image processor for identifying image contrast; an image processor for computing image sharpness; a processor for three-dimensional reconstruction of an image; and a mixer () for mixing a secondary electron signal and a specimen forward scattered electron signal.


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