The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Mar. 12, 2010
Applicants:

Masashi Nagamori, Fujimino, JP;

Yuji Hagiwara, Kawagoe, JP;

Takashi Masubuchi, Fujimino, JP;

Satoru Narizuka, Saitama, JP;

Inventors:

Masashi Nagamori, Fujimino, JP;

Yuji Hagiwara, Kawagoe, JP;

Takashi Masubuchi, Fujimino, JP;

Satoru Narizuka, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 313/04 (2006.01); G03F 7/00 (2006.01); G03F 7/004 (2006.01); C07C 303/32 (2006.01); C07C 381/12 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C07C 313/04 (2013.01); C07C 2101/08 (2013.01); G03F 7/0045 (2013.01); G03F 7/0392 (2013.01); C07C 2103/74 (2013.01); C07C 2102/42 (2013.01); C07C 2101/14 (2013.01); C07C 303/32 (2013.01); G03F 7/0046 (2013.01); C07C 381/12 (2013.01);
Abstract

When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.


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