The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2014
Filed:
May. 06, 2011
Applicants:
Eric J. Shero, Phoenix, AZ (US);
Petri I. Raisanen, Gilbert, AZ (US);
Sung-hoon Jung, Tempe, AZ (US);
Chang-gong Wang, Chandler, AZ (US);
Inventors:
Eric J. Shero, Phoenix, AZ (US);
Petri I. Raisanen, Gilbert, AZ (US);
Sung-Hoon Jung, Tempe, AZ (US);
Chang-Gong Wang, Chandler, AZ (US);
Assignee:
ASM America, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 21/00 (2006.01); C23C 16/40 (2006.01); C23C 16/30 (2006.01); H01L 21/02 (2006.01); H01L 29/51 (2006.01); C23C 16/455 (2006.01); H01L 21/28 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0228 (2013.01); C23C 16/40 (2013.01); C23C 16/308 (2013.01); H01L 29/78 (2013.01); H01L 21/02183 (2013.01); H01L 29/518 (2013.01); C23C 16/45553 (2013.01); H01L 21/28202 (2013.01); C23C 16/30 (2013.01); H01L 21/02189 (2013.01); H01L 21/02181 (2013.01); C23C 16/45531 (2013.01); C23C 16/401 (2013.01); H01L 21/02194 (2013.01); C23C 16/405 (2013.01); C23C 16/45542 (2013.01); H01L 21/02192 (2013.01);
Abstract
The present invention relates to a process and system for depositing a thin film onto a substrate. One aspect of the invention is depositing a thin film metal oxide layer using atomic layer deposition (ALD).
Published as: