The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2014

Filed:

Feb. 24, 2014
Applicant:

Gigaphoton Inc., Oyama-shi, Tochigi-ken, JP;

Inventors:

Hiroshi Umeda, Oyama, JP;

Toshiyuki Hirashita, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); G21K 5/00 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G21K 5/00 (2013.01);
Abstract

A target supply devicemay include a tank, formed of a metal, that holds a target material, an insulating memberthat makes contact with at least part of the periphery of the tank, and a heaterthat is separated from the tankand heats the tankvia the insulating member


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