The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Feb. 24, 2014
Applicant:
Gigaphoton Inc., Oyama-shi, Tochigi-ken, JP;
Inventors:
Hiroshi Umeda, Oyama, JP;
Toshiyuki Hirashita, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); G21K 5/00 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G21K 5/00 (2013.01);
Abstract
A target supply devicemay include a tank, formed of a metal, that holds a target material, an insulating memberthat makes contact with at least part of the periphery of the tank, and a heaterthat is separated from the tankand heats the tankvia the insulating member
Umeda, Hiroshi. (2014). Target supply device and extreme ultraviolet light generation apparatus (U.S. Patent No. 8872126). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8872126
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile