The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Mar. 21, 2012
Venkatesan Murali, San Jose, CA (US);
Arvind Chari, Saratoga, CA (US);
Gopal Prabhu, San Jose, CA (US);
Christopher J. Petti, Mountain View, CA (US);
Venkatesan Murali, San Jose, CA (US);
Arvind Chari, Saratoga, CA (US);
Gopal Prabhu, San Jose, CA (US);
Christopher J. Petti, Mountain View, CA (US);
GTAT Corporation, Merrimack, NH (US);
Abstract
A method for fabricating a backside-illuminated sensor includes providing a thin film semiconductor lamina having a first conductivity, and forming a doped region having a second conductivity within the lamina and at a front surface of the lamina. The lamina may be provided as a free-standing lamina, or may be provided as a semiconductor donor body from which the lamina is cleaved. An electrical connection is formed to the doped region. A temporary carrier is contacted to the back surface of the semiconductor and later removed. A backside-illuminated sensor is fabricated from the semiconductor lamina, in which the thickness of the semiconductor lamina remains substantially unchanged during the fabrication process.