The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Jan. 28, 2011
Applicants:
Hyo-jin Yun, Suwon-si, KR;
Jae-ho Kim, Yongin-si, KR;
Young-ho Kim, Yongin-si, KR;
Boo-deuk Kim, Suwon-si, KR;
Jin-a Ryu, Hwaseong-si, KR;
Myung-sun Kim, Seoul, KR;
Se-kyung Baek, Hwaseong-si, KR;
Soo-kyung Kim, Suwon-si, KR;
Ji-yun Ham, Seongnam-si, KR;
Inventors:
Hyo-Jin Yun, Suwon-si, KR;
Jae-Ho Kim, Yongin-si, KR;
Young-Ho Kim, Yongin-si, KR;
Boo-Deuk Kim, Suwon-si, KR;
Jin-A Ryu, Hwaseong-si, KR;
Myung-Sun Kim, Seoul, KR;
Se-Kyung Baek, Hwaseong-si, KR;
Soo-Kyung Kim, Suwon-si, KR;
Ji-Yun Ham, Seongnam-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/38 (2006.01); C07C 303/32 (2006.01); C07C 309/06 (2006.01); C07C 309/12 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); C07C 303/32 (2013.01); G03F 7/0045 (2013.01); C07C 309/12 (2013.01); G03F 7/0397 (2013.01); G03F 7/20 (2013.01); C07C 309/06 (2013.01); Y10S 430/122 (2013.01); Y10S 430/123 (2013.01);
Abstract
A photoresist composition for fabricating a probe array is provided. The photoresist composition includes a photoacid generator having an onium salt and an i-line reactive sensitizer.