The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2014

Filed:

Mar. 23, 2010
Applicant:

Hiroshi Nakayama, Osaka, JP;

Inventor:

Hiroshi Nakayama, Osaka, JP;

Assignees:

Material Design Factory Co., Ltd., Osaka-shi, JP;

Air Water Inc., Sapporo-shi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/04 (2006.01); B29D 22/00 (2006.01); C23C 16/36 (2006.01); H01L 51/52 (2006.01); H01L 31/0392 (2006.01); H01L 31/048 (2014.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); H01L 31/0216 (2014.01);
U.S. Cl.
CPC ...
H01L 51/5237 (2013.01); C23C 16/36 (2013.01); H01L 31/0392 (2013.01); H01L 31/048 (2013.01); C23C 16/30 (2013.01); C23C 16/44 (2013.01); Y02E 10/50 (2013.01); H01L 31/02167 (2013.01);
Abstract

A gas barrier film in which a gas barrier layer deposited by catalyst CVD in contact with each of both main surfaces of a plastic film is an SiCNFH layer satisfying conditions of 0.01<I(SiH)/I(SiN)<0.05, 0.00<I(CH)/I(SiN)<0.07, 0.04<I(NH)/I(SiN)<0.08, and 0.05<I(CF)/I(SiN)<0.3; an SiOCNH layer satisfying conditions of 0.1<I(SiH)/I(NH)<0.9, 0.0<I(CH)/I(NH)<0.3, 8<I(SiN)/I(NH)<20, and 2<I(SiO)/I(NH)<8; or an SiCNH layer satisfying conditions of 0.01<I(SiH)/I(SiN)<0.05, 0.00<I(CH)/I(SiN)<0.07 and 0.04<I(NH)/I(SiN)<0.08. Here, the 'I' represents peak intensity of Fourier transform infrared spectroscopy related to an atomic bond shown in the parentheses after the 'I'.


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