The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Mar. 11, 2010
Stephan Voser, Grabs, CH;
Gerhard Dovids, Maienfeld, CH;
Stephan Voser, Grabs, CH;
Gerhard Dovids, Maienfeld, CH;
Oerlikon Advanced Technologies AG, Balzers, LI;
Abstract
A transport arrangement () for bi-directionally transporting substrates towards and from a load lock () comprises a first substrate handler () swivelable about a first axis (A) and with at least two first substrate carriers (). A second substrate handler () swivelable about a second axis (A) comprises at least four second substrate carriers (to). First and second substrate carriers are mutually aligned respectively in one position of their respective swiveling trajectory paths as one of the first substrate carriers is aligned with one of the second substrate carriers and the other of the first substrate carriers is aligned with the load lock (). The first substrate carriers () are movable towards and from the load lock () once aligned there with and thereby form respectively external valves of the load lock ().