The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Apr. 21, 2009
Siegfried Krassnitzer, Feldkirch, AT;
Oliver Gstoehl, Balzers, LI;
Markus Esselbach, Feldkirch, AT;
Oerlikon Trading AG, Truebbach, Truebbach, CH;
Abstract
Planetary carriers () for workpieces mounted on a carousel () are provided within a vacuum chamber. A source () for a cloud comprising ions (CL) is provided so that a central axis (A) of the cloud intercepts the rotary axis (A) of the carousel (). The cloud (CL) has an ion density profile at the moving path (T) of planetary axes (A) which drops to 50% of the maximum ion density at a distance from the addressed center axis (A) which is at most half the diameter of the planetary carriers (). When workpieces upon the planetary carriers () are etched by the cloud comprising ions material which is etched off is substantially not redeposited on neighboring planetary carriers but rather ejected towards the wall of the vacuum chamber.