The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Feb. 06, 2006
Hans Jansen, Eindhoven, NL;
Marco Koert Stavenga, Eindhoven, NL;
Jacobus Johannus Leonardus Hendricus Verspay, Thorn, NL;
Franciscus Johannes Joseph Janssen, Eindhoven, NL;
Anthonie Kuijper, Bruegel, NL;
Hans Jansen, Eindhoven, NL;
Marco Koert Stavenga, Eindhoven, NL;
Jacobus Johannus Leonardus Hendricus Verspay, Thorn, NL;
Franciscus Johannes Joseph Janssen, Eindhoven, NL;
Anthonie Kuijper, Bruegel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An immersion liquid is provided comprising an ion-forming component, e.g. an acid or a base, that has a relatively high vapor pressure. Also provided are lithography processes and lithography systems using the immersion liquid.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile