The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2014

Filed:

May. 19, 2008
Applicants:

Kevin J. Kjoller, Santa Barbara, CA (US);

Ami Chand, Goleta, CA (US);

Nihat Okulan, Los Angeles, CA (US);

Inventors:

Kevin J. Kjoller, Santa Barbara, CA (US);

Ami Chand, Goleta, CA (US);

Nihat Okulan, Los Angeles, CA (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 21/00 (2006.01); G01Q 60/38 (2010.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 60/38 (2013.01); B82Y 35/00 (2013.01);
Abstract

A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.


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