The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Oct. 18, 2011
Ramidin Izair Kamidi, Eindhoven, NL;
Hans Butler, Best, NL;
Martijn Houkes, Sittard, NL;
Marinus Maria Johannes Van DE Wal, Oirschot, NL;
Jeroen Johan Maarten Van DE Wijdeven, Eindhoven, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Hans Butler, Best, NL;
Martijn Houkes, Sittard, NL;
Marinus Maria Johannes Van De Wal, Oirschot, NL;
Jeroen Johan Maarten Van De Wijdeven, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A controller is provided that controls an actuator system having a plurality of actuators arranged to act on an object. The controller uses a gain balancing matrix to convert a first control signal, representing a set of forces desired to be provided to the center of gravity of the object into a second control signal, representing an equivalent set of forces to be provided by the plurality of actuators. The system is further configured such that a first gain balancing matrix is used at a first frequency band and a second gain balancing matrix is used at a second frequency band.