The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Mar. 18, 2009
Michael B. Binnard, Belmont, CA (US);
Scott Coakley, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Pai-hsueh Yang, Palo Alto, CA (US);
Michael B. Binnard, Belmont, CA (US);
Scott Coakley, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.