The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Jun. 27, 2011
Applicants:
Jayhoon Chung, Plano, TX (US);
Catherine Beth Vartuli, Richardson, TX (US);
Guoda Lian, Plano, TX (US);
Inventors:
Jayhoon Chung, Plano, TX (US);
Catherine Beth Vartuli, Richardson, TX (US);
Guoda Lian, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/00 (2006.01); G01P 15/08 (2006.01); H01L 27/14 (2006.01); H01L 21/66 (2006.01); G01B 15/06 (2006.01); G01B 7/16 (2006.01);
U.S. Cl.
CPC ...
G01B 7/16 (2013.01); H01L 22/12 (2013.01); G01B 15/06 (2013.01); H01L 22/34 (2013.01);
Abstract
A test structure for measuring strain in the channel of transistors. A method of correlating transistor performance with channel strain.