The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Apr. 23, 2010
Ian Kenworthy, Campbell, CA (US);
Duane Outka, Fremont, CA (US);
Fangli Hao, Cupertino, CA (US);
Leonard Sharpless, Fremont, CA (US);
Yijun Du, Pleasanton, CA (US);
Ian Kenworthy, Campbell, CA (US);
Duane Outka, Fremont, CA (US);
Fangli Hao, Cupertino, CA (US);
Leonard Sharpless, Fremont, CA (US);
Yijun Du, Pleasanton, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of coating the inner surfaces of gas passages of a gas delivery system for a plasma process system such as a plasma etching system includes (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.