The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Feb. 07, 2011
Applicant:
Juergen Weichart, Balzers, LI;
Inventor:
Juergen Weichart, Balzers, LI;
Assignee:
Oerlikon Advanced Technologies AG, Balzers, LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3408 (2013.01); H01J 37/3455 (2013.01);
Abstract
A magnetron source comprises a target () with a sputtering surface and a back surface. A magnet arrangement () is drivingly moved along the backside of the target (). A tunnel-shaped magnetron magnetic field is generated between an outer loop () and an inner loop () of the magnet arrangement. Elongated pivotable or rotatable permanent magnet arrangements () of the magnet arrangement are provided in an interspace between the outer and inner loops () of the overall arrangement.