The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Oct. 12, 2011
Applicants:
Shouqian Shao, Fremont, CA (US);
Jay Dedontney, Prunedale, CA (US);
Jason Wright, Saratoga, CA (US);
Inventors:
ShouQian Shao, Fremont, CA (US);
Jay DeDontney, Prunedale, CA (US);
Jason Wright, Saratoga, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/76 (2006.01); G01N 25/20 (2006.01); G01N 33/00 (2006.01); G01F 1/74 (2006.01); G01N 25/18 (2006.01); B05C 11/06 (2006.01);
U.S. Cl.
CPC ...
G01F 1/74 (2013.01); G01N 33/0039 (2013.01); G01N 25/18 (2013.01);
Abstract
Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.