The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Aug. 12, 2011
Johannes Lippert, Buch am Wald, DE;
Dirk Schaffer, Jena, DE;
Johannes Lippert, Buch am Wald, DE;
Dirk Schaffer, Jena, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
To reduce deformations which may be caused by a functional coating on a substrate in an optical element for UV or EUV lithography, an optical element is suggested comprising a functional coating () on a first surface () of a substrate (), wherein the substrate () comprises a second surface () having a common edge () with the first surface (), and the second surface () also has a coating () and the thickness tand the stress σof the coating () on the second surface () are chosen such that, in combination with the thickness tand the stress σof the functional coating () on the first surface (), the condition is fulfilled, wherein X has a value between 0.8 and 5.0.