The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Jul. 29, 2013
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Koji Uematsu, Itami, JP;

Hideki Osada, Itami, JP;

Seiji Nakahata, Itami, JP;

Shinsuke Fujiwara, Itami, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/20 (2006.01); H01L 29/04 (2006.01); H01L 21/20 (2006.01); H01L 21/02 (2006.01); C30B 33/06 (2006.01); C30B 29/40 (2006.01); H01L 33/16 (2010.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
H01L 21/02433 (2013.01); H01L 21/02658 (2013.01); H01L 21/0243 (2013.01); H01L 21/0262 (2013.01); H01L 21/02609 (2013.01); C30B 33/06 (2013.01); C30B 29/406 (2013.01); H01L 21/02389 (2013.01); C30B 29/403 (2013.01); H01L 33/16 (2013.01); H01L 33/32 (2013.01); H01L 21/0254 (2013.01);
Abstract

A method for producing a Group III nitride crystal includes the steps of cutting a plurality of Group III nitride crystal substratesandhaving a major surface from a Group III nitride bulk crystal, the major surfacesandhaving a plane orientation with an off-angle of five degrees or less with respect to a crystal-geometrically equivalent plane orientation selected from the group consisting of {20−21}, {20−2−1}, {22−41}, and {22−4−1}, transversely arranging the substratesandadjacent to each other such that the major surfacesandof the substratesandare parallel to each other and each [0001] direction of the substratesandcoincides with each other, and growing a Group III nitride crystalon the major surfacesandof the substratesand


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