The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Aug. 31, 2012
Applicants:
Woo-cheol Lee, Suwon-si, KR;
Tokashiki Ken, Seongnam-si, KR;
Hyung-joon Kwon, Seongnam-si, KR;
Myung-hoon Jung, Suwon-si, KR;
Inventors:
Woo-cheol Lee, Suwon-si, KR;
Tokashiki Ken, Seongnam-si, KR;
Hyung-joon Kwon, Seongnam-si, KR;
Myung-hoon Jung, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a magnetic device includes forming a stack structure, the stack structure including a magnetic layer, and etching the stack structure by using an etching gas, the etching gas including at least 80% by volume of Hgas.