The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Nov. 16, 2011
Applicants:
Hidetaka Sawada, Tokyo, JP;
Takeo Sasaki, Tokyo, JP;
Inventors:
Hidetaka Sawada, Tokyo, JP;
Takeo Sasaki, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 2237/1501 (2013.01); H01J 37/1471 (2013.01); H01J 2237/262 (2013.01); H01J 2237/1532 (2013.01); H01J 37/26 (2013.01);
Abstract
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel.