The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Mar. 28, 2012
Lee Chen, Cedar Creek, TX (US);
Barton Lane, Austin, TX (US);
Merritt Funk, Austin, TX (US);
Jianping Zhao, Austin, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
Lee Chen, Cedar Creek, TX (US);
Barton Lane, Austin, TX (US);
Merritt Funk, Austin, TX (US);
Jianping Zhao, Austin, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
An ion energy analyzer for determining an ion energy distribution of a plasma and comprising an entrance grid, a selection grid, and an ion collector. The entrance grid includes a first plurality of openings dimensioned to be less than a Debye length for the plasma. The ion collector is coupled to the entrance grid via a first voltage source. The selection grid is positioned between the entrance grid and the ion collector and is coupled to the entrance grid via a second voltage source. An ion current meter is coupled to the ion collector to measure an ion flux onto the ion collector and transmit a signal related thereto.