The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2014

Filed:

Mar. 27, 2012
Applicants:

Yusuke Iizuka, Haibara-gun, JP;

Akinori Shibuya, Haibara-gun, JP;

Naohiro Tango, Haibara-gun, JP;

Shohei Kataoka, Haibara-gun, JP;

Inventors:

Yusuke Iizuka, Haibara-gun, JP;

Akinori Shibuya, Haibara-gun, JP;

Naohiro Tango, Haibara-gun, JP;

Shohei Kataoka, Haibara-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/38 (2006.01); G03F 7/039 (2006.01); G03F 7/075 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0046 (2013.01); G03F 7/0045 (2013.01); G03F 7/0397 (2013.01); G03F 7/0758 (2013.01); G03F 7/2041 (2013.01); Y10S 430/111 (2013.01); Y10S 430/122 (2013.01); Y10S 430/123 (2013.01);
Abstract

The actinic ray-sensitive or radiation-sensitive resin composition of the present invention contains (A) a resin capable of increasing the solubility in an alkaline developer by the action of an acid, and (C) at least one selected from the group of compounds represented by the following formula (ZI-3), (ZI-4) or (ZI-5) and capable of generating an acid upon irradiation of actinic rays or radiation, wherein the resin (A) contains at least one repeating unit having a group capable of decomposing by the action of an acid to leave a leaving group having a ring structure, and the leaving group having a ring structure has at least one of a polar group as a substituent and a polar atom as a part of the ring structure, and a compound derived from the leaving group having a ring structure has a logP value of not less than 0 and less than 2.8.


Find Patent Forward Citations

Loading…