The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
May. 17, 2010
Catharinus DE Schiffart, Nijmegen, NL;
Andre Bernardus Jeunink, Bergeijk, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-stegeman, Eindhoven, NL;
Norbert Erwin Therenzo Jansen, Eindhoven, NL;
Catharinus De Schiffart, Nijmegen, NL;
Andre Bernardus Jeunink, Bergeijk, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Sander Frederik Wuister, Eindhoven, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Norbert Erwin Therenzo Jansen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An arrangement suitable for use in an imprint lithography apparatus is disclosed. The arrangement includes a support structure arranged to support an imprint template arrangement, a first actuator configured to apply a force to the imprint template arrangement, and a second actuator attached to the support structure, and arranged in use to extend between the support structure and the imprint template arrangement, the second actuator configured to apply a force to the imprint template arrangement, a range of movement of the second actuator being greater than a range of movement of the first actuator.