The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2014
Filed:
Oct. 29, 2008
Tony Mitsuaki Tani, Poway, CA (US);
Larry Ray Stuckey, San Diego, CA (US);
Tony Mitsuaki Tani, Poway, CA (US);
Larry Ray Stuckey, San Diego, CA (US);
Advantest Corporation, Tokyo, JP;
Abstract
An apparatus is provided for controlling a temperature of a device by circulating fluid through a heat sink in thermal contact with the device. The apparatus includes a first fluid source () including a first fluid having a first temperature, a second fluid source () including a second fluid having a second temperature, and a thermal chuck () operably connected to the first fluid source and the second fluid source, wherein the thermal chuck is configured to receive the first fluid and the second fluid to be circulated through the heat sink (). A method is also provided for controlling a temperature of a device in contact with a heat sink. The method includes determining a target temperature (S), initiating a flow of a fluid from a fluid source (S, S), determining temperature data (S, S) of the device and the heat sink, and variably adjusting a flow rate (S, S) of the fluid to generally maintain the device at the target temperature.