The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2014
Filed:
Jan. 06, 2012
Daniel C. Wack, Fredericksburg, VA (US);
Damon F. Kvamme, Los Gatos, CA (US);
John R. Rogers, Monrovia, CA (US);
James P. Mcguire, Jr., Pasadena, CA (US);
John M. Rodgers, Pasadena, CA (US);
Daniel C. Wack, Fredericksburg, VA (US);
Damon F. Kvamme, Los Gatos, CA (US);
John R. Rogers, Monrovia, CA (US);
James P. McGuire, Jr., Pasadena, CA (US);
John M. Rodgers, Pasadena, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to an apparatus that includes an illumination source () for illuminating a target substrate (), objective optics () for projecting the EUV light which is reflected from the target substrate, and a sensor () for detecting the projected EUV light. The objective optics includes a first mirror (, or) which is arranged to receive and reflect the EUV light which is reflected from the target substrate, a second mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the first mirror, a third mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the second mirror, and a fourth mirror (, or) which is arranged to receive and reflect the EUV light which is reflected by the third mirror.