The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2014
Filed:
Jun. 27, 2012
Scott A. Hendrickson, Brentwood, CA (US);
Liliya Krivulina, Sunnyvale, CA (US);
Juan Carlos Rocha, San Carlos, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Scott A. Hendrickson, Brentwood, CA (US);
Liliya Krivulina, Sunnyvale, CA (US);
Juan Carlos Rocha, San Carlos, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Devices and methods are provided for monitoring low-level microwave excursions from a UV curing system to determine if equipment is damaged, such as screen tears or improper assembly of UV lampheads. A radio frequency (RF) detector may be used to detect microwaves in a range of about 0.2-5 mW/cm, wherein the RF detector comprises an antenna with a hoop shaped portion, a circuit board having a diode detector and an amplifier circuit, a housing, and a bracket coupled to the housing that is suitable for coupling the RF detector to the UV curing system. An alarm threshold may also be set, which can be correlated to microwave levels at or below levels that could cause damage to semiconductor devices being processed. A substrate processing system comprising an RF detector is also provided.