The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2014

Filed:

Feb. 22, 2011
Applicants:

Nobuo Tanaka, Nagoya, JP;

Tsutomu Nakanishi, Nagoya, JP;

Yoshikazu Takeda, Nagoya, JP;

Hidefumi Asano, Nagoya, JP;

Koh Saitoh, Nagoya, JP;

Toru Ujihara, Nagoya, JP;

Makoto Kuwahara, Nagoya, JP;

Inventors:

Nobuo Tanaka, Nagoya, JP;

Tsutomu Nakanishi, Nagoya, JP;

Yoshikazu Takeda, Nagoya, JP;

Hidefumi Asano, Nagoya, JP;

Koh Saitoh, Nagoya, JP;

Toru Ujihara, Nagoya, JP;

Makoto Kuwahara, Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/073 (2006.01);
U.S. Cl.
CPC ...
H01J 37/26 (2013.01); H01J 2237/06383 (2013.01); H01J 2237/06333 (2013.01); H01J 37/073 (2013.01); H01J 2237/24557 (2013.01);
Abstract

An electron microscope which utilizes a polarized electron beam and can obtain a high contrast image of a sample is provided. The microscope includes: a laser; a polarization apparatus that polarizes a laser beam into a circularly polarized laser beam; a semiconductor photocathode that is provided with a strained superlattice semiconductor layer and generates a polarized electron beam when irradiated with the circularly polarized laser beam; a transmission electron microscope that utilizes the polarized electron beam; an electron beam intensity distribution recording apparatus arranged at a face reached by the polarized electron beam that has transmitted through the sample. An electron beam intensity distribution recording apparatus records an intensity distribution before and after the polarization of the electron beam is reversed, and a difference acquisition apparatus calculates a difference therebetween.


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