The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2014
Filed:
Jun. 29, 2012
Shohei Kataoka, Haibara-gun, JP;
Yusuke Iizuka, Haibara-gun, JP;
Akinori Shibuya, Haibara-gun, JP;
Tomoki Matsuda, Haibara-gun, JP;
Naohiro Tango, Haibara-gun, JP;
Shohei Kataoka, Haibara-gun, JP;
Yusuke Iizuka, Haibara-gun, JP;
Akinori Shibuya, Haibara-gun, JP;
Tomoki Matsuda, Haibara-gun, JP;
Naohiro Tango, Haibara-gun, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
An actinic-ray-sensitive or radiation-sensitive resin composition which is capable of improving line edge roughness (LER) and inhibiting pattern collapse, a resist film and a pattern forming method each using the same, a method for preparing an electronic device, and an electronic device are provided. The actinic-ray-sensitive or radiation-sensitive resin composition contains:
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile