The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2014
Filed:
Dec. 02, 2009
Kazuhiro Musha, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Kiyotaka Yamada, Chigasaki, JP;
Ulvac, Inc., Kanagawa, JP;
Abstract
[Object] To provide a seal mechanism that reduces a maintenance frequency for replenishment of a lubricating material and has small friction resistance, and a treatment apparatus equipped with the seal mechanism. [Solving Means] A lip seal () of a seal mechanism () is arranged so as to surround a drive shaft (), and a lip portion () thereof includes a seal portion () that comes into contact with the drive shaft (). A wall member () is attached to the drive shaft () so as to close a lower opening of a mounting member () and face the lip seal (). By at least the mounting member () and the wall member (), a container capable of accommodating a lubricating material () is formed. A gap () set such that the lubricating material () does not pass therethrough is provided between the wall member () and a holding base body (). With such a structure, a space for accommodating the lubricating material () can be secured and the seal mechanism () and the drive shaft () are allowed to be in contact with each other only at the seal portion () of the lip seal ().