The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Nov. 04, 2011
Bernd Srocka, Berlin, DE;
Marko Doring, Dresden, DE;
Bernd Srocka, Berlin, DE;
Marko Doring, Dresden, DE;
HSEB Dresden GmbH, Dresden, DE;
Abstract
A Method for inspecting flat objects, especially wafers, with an object surface, comprises the steps of: scanning a digital image with a plurality of image points of said object surface with color- or grey values for each of said image points; detecting defects on said object surface by comparing said scanned digital image to a digital reference image; defining and selecting corresponding portions in said scanned digital image and in the digital reference image; determining a representative color- or grey value for each of said selected portions; calculating a compare value from said representative color- or grey value of said scanned digital image of a portion and a representative color- or grey value of said digital reference image of the same portion; and correcting each image point of said scanned digital image with a correction value determined from said compare value of step (e).