The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Mar. 15, 2011
Tommy Weiss, Sunnyvale, CA (US);
Nevo Laron, Walnut Creek, CA (US);
Thomas Molders, Ertvelde, BE;
Aki Shoukrun, Petach Tikva, IL;
Nadav Wertsman, Ein Hod, IL;
Tommy Weiss, Sunnyvale, CA (US);
Nevo Laron, Walnut Creek, CA (US);
Thomas Molders, Ertvelde, BE;
Aki Shoukrun, Petach Tikva, IL;
Nadav Wertsman, Ein Hod, IL;
Camtek Ltd., Migdal Haemek, IL;
Abstract
A system and method for monitoring a manufacturing process of a fan-out wafer, the method may include acquiring a first set of images of dies after a completion of a first manufacturing stage of a manufacturing process of the fan-out wafer; processing the first set of images to detect defects; performing at least one corrective operation in response to at least one defect detected by processing the first set of images; acquiring a second set of images of dies after a completion of a second manufacturing stage of the manufacturing process of the fan-out wafer, the second manufacturing process follows the first manufacturing process; processing the second set of images to detect defects; and performing at least one corrective operation in response to at least one defect detected by processing the second set of images.