The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2014
Filed:
Oct. 29, 2009
Applicant:
Wipul Pemsiri Jayasekara, Los Gatos, CA (US);
Inventor:
Wipul Pemsiri Jayasekara, Los Gatos, CA (US);
Assignee:
SanDisk 3D LLC, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 47/00 (2006.01); H01L 45/00 (2006.01); H01L 27/24 (2006.01); B82Y 10/00 (2011.01); H01L 51/05 (2006.01); H01L 51/00 (2006.01); G11C 13/02 (2006.01);
U.S. Cl.
CPC ...
H01L 45/04 (2013.01); H01L 45/12 (2013.01); H01L 27/2409 (2013.01); H01L 45/1233 (2013.01); H01L 45/1616 (2013.01); G11C 2213/72 (2013.01); H01L 51/0048 (2013.01); H01L 45/1675 (2013.01); B82Y 10/00 (2013.01); G11C 2213/71 (2013.01); G11C 13/025 (2013.01); H01L 45/1608 (2013.01); H01L 45/149 (2013.01); H01L 51/0591 (2013.01); H01L 27/2481 (2013.01);
Abstract
Methods in accordance with this invention form a microelectronic structure by forming a carbon nano-tube ('CNT') layer, and forming a boron nitride layer ('BN liner') above the CNT layer, wherein the BN liner comprises: (1) a first portion disposed above and in contact with the CNT layer; and/or (2) a second portion disposed in and/or around one or more carbon nano-tubes in the CNT layer. Numerous other aspects are provided.