The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8831910 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 09, 2014

Filed:

Mar. 10, 2010
Applicants:

Yoshitomo Shintani, Toyota, JP;

Katsuichi Kitagawa, Moriyama, JP;

Inventors:

Yoshitomo Shintani, Toyota, JP;

Katsuichi Kitagawa, Moriyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 15/00 (2006.01); G01B 5/18 (2006.01); G01B 7/26 (2006.01); G01B 11/22 (2006.01); H01L 21/66 (2006.01); G02B 21/00 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/9505 (2013.01); H01L 22/24 (2013.01); G01N 2021/8864 (2013.01); G01N 2021/8896 (2013.01); G01B 11/22 (2013.01); G02B 21/0056 (2013.01); G01N 2021/8874 (2013.01);
Abstract

A method of measuring the density of a plurality of defects that occur in a single crystal for each type of defect, includes: etching an observation surface, which is a surface of the single crystal, to form an etch pits at each defect; calculating the maximum depth, mean depth and depth curvature of each of etch pits formed at a plurality of defects present within a predetermined area on the observation surface; and comparing the measured maximum depth, mean depth and depth curvature with respective reference values to determine the type of each defect within the predetermined area.


Find Patent Forward Citations

Shintani, Yoshitomo. (2014). Method of measuring defect density of single crystal (U.S. Patent No. 8831910). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8831910

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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