The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Aug. 16, 2012
Applicants:
Yong Jai Cho, Yuseong-gu, KR;
Won Che Gal, Yuseong-gu, KR;
Hyun MO Cho, Daejeon, KR;
Inventors:
Assignee:
Korea Research Institute of Standards and Science, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01N 2021/213 (2013.01);
Abstract
Provided is a real-time spectroscopic ellipsometer capable of obtaining information on properties of a sample, a nano pattern shape, in real time by measuring and analyzing, for a plurality of wavelengths, a change in a polarization state of incident light generated while being reflected or transmitted due to the sample when light having a specific polarization component is incident to the sample.