The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Sep. 13, 2010
Applicants:
Rody Koops, Eindhoven, NL;
Petrus Mathijs Henricus Vosters, Bladel, NL;
Franciscus Stadhouders, Eindhoven, NL;
Inventors:
Rody Koops, Eindhoven, NL;
Petrus Mathijs Henricus Vosters, Bladel, NL;
Franciscus Stadhouders, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 5/00 (2006.01); G03F 7/20 (2006.01); H01F 7/127 (2006.01);
U.S. Cl.
CPC ...
H01F 7/127 (2013.01); G03F 7/70758 (2013.01);
Abstract
An actuator includes a coil; a cooling body configured to cool the coil; a quantity of heat transfer material fixedly arranged between the cooling body and the coil, and a mechanical attacher configured to attach the coil to the cooling body.