The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Nov. 19, 2013
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Vivian W. Ryan, Berne, NY (US);

Holm Geisler, Dresden, DE;

Dirk Breuer, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/00 (2006.01); H01L 21/66 (2006.01); H01L 23/488 (2006.01);
U.S. Cl.
CPC ...
H01L 24/14 (2013.01); H01L 24/11 (2013.01); H01L 22/20 (2013.01); H01L 22/12 (2013.01); H01L 23/488 (2013.01);
Abstract

A system for repairing pillar bumps includes a pillar bump repair device that is adapted to form a plurality of strain-relieving notches in a pillar bump that is positioned above a metallization system of a semiconductor chip. The system further includes a pillar bump support device that is adapted to substantially support the pillar bump while the pillar bump repair device is forming each of the plurality of strain-relieving notches.


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