The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
May. 03, 2011
E. Michael Heaven, North Vancouver, CA;
Gordon Matthew Deans, West Vancouver, CA;
Kenneth Cadien, Edmonton, CA;
Stephen Warren Blaine, West Vancouver, CA;
E. Michael Heaven, North Vancouver, CA;
Gordon Matthew Deans, West Vancouver, CA;
Kenneth Cadien, Edmonton, CA;
Stephen Warren Blaine, West Vancouver, CA;
Aurora Control Technologies Inc., North Vancouver, British Columbia, CA;
Abstract
A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material and splitting the radiation into two beams, passing each beam through pass band filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile