The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Sep. 17, 2013
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Luke G. England, Tervuren, BE;

Paul A. Silvestri, Chandler, AZ (US);

Michel Koopmans, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/50 (2006.01); H01L 21/48 (2006.01); H01L 21/66 (2006.01); H01L 21/44 (2006.01); H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01); H01L 21/683 (2006.01); H01L 25/18 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 21/56 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/11334 (2013.01); H01L 2225/06541 (2013.01); H01L 24/97 (2013.01); H01L 25/18 (2013.01); H01L 22/10 (2013.01); H01L 2221/68327 (2013.01); H01L 24/11 (2013.01); H01L 23/3128 (2013.01); H01L 2224/131 (2013.01); H01L 2225/06513 (2013.01); H01L 24/81 (2013.01); H01L 2224/05655 (2013.01); H01L 2224/11332 (2013.01); H01L 25/50 (2013.01); H01L 25/0657 (2013.01); H01L 2224/11849 (2013.01); H01L 21/561 (2013.01); H01L 24/16 (2013.01); H01L 22/32 (2013.01); H01L 2224/97 (2013.01); H01L 2224/94 (2013.01); H01L 21/6836 (2013.01); H01L 24/13 (2013.01); H01L 24/94 (2013.01); H01L 2224/16146 (2013.01);
Abstract

Methods of fabricating multi-die assemblies including a wafer segment having no integrated circuitry thereon and having a plurality of vertically stacked dice thereon electrically interconnected by conductive through vias, resulting multi-die assemblies, and semiconductor devices comprising such multi-die assemblies. The wafer segment may function as a heat sink to enhance heat transfer from the stacked dice in the resulting multi-die assembly. The die stacks are fabricated at the wafer level on a base wafer, from which the wafer segment and die stacks are singulated after at least peripheral encapsulation.


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