The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Aug. 19, 2011
Applicants:
Geraud Jean-michel Dubois, San Jose, CA (US);
Theo J. Frot, Los Gatos, CA (US);
Willi Volksen, San Jose, CA (US);
Inventors:
Geraud Jean-Michel Dubois, San Jose, CA (US);
Theo J. Frot, Los Gatos, CA (US);
Willi Volksen, San Jose, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 1/00 (2006.01); B05D 5/00 (2006.01); B05D 3/00 (2006.01); B05D 7/22 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B05D 7/22 (2013.01); H01L 21/02203 (2013.01);
Abstract
Porous films are homogeneously and partially (but not completely) filled. A composition (that includes a polymer) is brought into contact with a planar film that has interconnected pores throughout the film. The polymer then partially fills the pores within the film, e.g., in response to being heated. An additional treatment such as heating the polymer and/or applying radiation to the polymer increases the Young's modulus of the film.