The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Dec. 23, 2009
Mohamed A. Abdelmoneum, Portland, OR (US);
Tawfik M. Rahal-arabi, Tigard, OR (US);
Gregory F. Taylor, Portland, OR (US);
Kevin J. Fischer, Hillsboro, OR (US);
Andrew Yeoh, Portland, OR (US);
Mohamed A. Abdelmoneum, Portland, OR (US);
Tawfik M. Rahal-Arabi, Tigard, OR (US);
Gregory F. Taylor, Portland, OR (US);
Kevin J. Fischer, Hillsboro, OR (US);
Andrew Yeoh, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Methods and apparatuses for Micro-Electro-Mechanical Systems (MEMS) resonator to monitor temperature in an integrated circuit. Fabricating the resonator in an interconnect layer provides a way to implement thermal detection means which is tolerant of manufacturing process variations. Sensor readout and control circuits can be on silicon if desired, for example, a positive feedback amplifier to form an oscillator in conjunction with the resonator and a counter to count oscillator frequency.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile