The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Jun. 14, 2013
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Markus Mengel, Heidenheim, DE;
Ulrich Wegmann, Koenigsbronn, DE;
Albrecht Ehrmann, Aalen, DE;
Wolfgang Emer, Aalen, DE;
Reiner Clement, Amstetten, DE;
Ludo Mathijssen, Schwaebisch Gmuend, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
Methods for measuring the image quality of a projection objective include providing a measuring structure on an image-side of the projection objective, providing an immersion fluid between the projection objective and the measuring structure, directing light through the projection objective and the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid, detecting light transmitted by the measuring structure, and determining an image quality of the projection objective based on the detected light.